Marcus KleinManaging Director, SURAGUS GmbH
Dipl.-Wi.-Ing. Marcus Klein is managing director of the SURAGUS GmbH. He got his master degree in Business and Engineering from University of Technology Dresden focusing on microelectronics and electronic packaging. Past working experiences include Siemens Pte Singapore, Wacker Chemie, Advanced Mask Technology Center and Fraunhofer Institute for non-destructive testing Dresden. He is managing director of SURAGUS since 2010.
演讲题目:Challenges and Insights by Electrical Characterization of Large Area Graphene Layers)
主题会场石墨烯在电子器件的应用
开始时间2017-09-25 11:10:00
结束时间2017-09-25 11:30:00
内容摘要
The current advances in the research and manufacturing of large area graphene layers are promising towards the introduction of this exciting material in display industry and other applications that benefit from excellent electrical and optical characteristics (cf. figure 1). New production technologies in the fabrication of flexible displays, touch screens or printed electronics apply graphene layers on non-metal substrates and bring new challenges to the required metrology. Traditional measurement concepts of layer thickness, sheet resistance and layer uniformity are difficult to apply to graphene production processes and are often harmful to the product layer. New non-contact sensor concepts are required to adapt to the challenges and even the foreseeable inline production of large area graphene. [1]
Dedicated non-contact measurement sensors are a pioneering method to leverage these issues in a large variety of applications, while significantly lowering the costs of development and process setup. Transferred and printed graphene layers can be characterized with high accuracy in a huge measurement range [2] using a very high resolution (cf. figure 2 and 3). Large area graphene mappings are applied for process optimization and for efficient quality control for transfer, doping, annealing and stacking processes. Examples of doped, defected and excellent Graphene are presented as quality images (cf. figure 4) and implications for manufacturers are explained [3] [4].